Abstract
Understanding the mechanical behavior of nanostructured and nanosized materials at the nanoscale is very important in improving their structural stability and operational reliability. This chapter introduces unique in-situ nanomechanical testing techniques in electron microscopes that assist in the precise positioning and direct characterization of nanoscale samples, while avoiding their aging or contamination by the environment. The first two short sections address the importance of mechanical behavior at the nanoscale and present some examples of conventional nanomechanical testing and ex-situ deformation observations. The third section introduces the instrument for in-situ nanomechanical testing in electron microscopes, the preparation of samples for testing, and some complimentary components of the tools. The final section presents some applications of the powerful techniques to achieve precise mechanical measurements and direct deformation/failure observations at the nanoscale of various materials of various dimensions.