Ion Beam Assisted Deposition of Transition-Metal Nitrides

Book chapter

C.-H. Ma, J.-H. Huang and Haydn Chen

Handbook on Residual Stress Handbook on Residual Stress, Vol.1

2005

Abstract

Ion Beam Assisted Deposition;Transition-Metal Nitrides

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Title: Ion Beam Assisted Deposition of Transition-Metal Nitrides
Creators - without role: C.-H. Ma
J.-H. Huang - 國立清華大學原子科學院工程與系統科學系
Haydn Chen
Publication Details: Handbook on Residual Stress Handbook on Residual Stress, Vol.1
Identifiers: 9957774300706774
Academic Unit: Department of Engineering and System Science, College of Nuclear Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Book chapter