摘要
In this paper, a micro-scale stress measurement system was developed to non-destructively measure the laser cutting residual stresses on the edges of ultra-thin glass plates. Three 50 μm thickness ultra-thin glass plates with different laser cutting processing procedures were measured. Experimental results showed that the difference between these three ultra-thin glass plates not only in stress value but also in stress distribution can be clearly identified by the micro-scale stress measurement system.