- Title
- Multi-layer Resist Systems as a Means to Submicrometer Optical Lithography
- Creators - without role
- 本堅 林 - 國立清華大學電機資訊學院電機工程學系
- Publication Details
- IEDM invited paper, (82), pp.391-394
- Identifiers
- 9957775369806774
- Academic Unit
- Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Book chapter
Book chapter
Multi-layer Resist Systems as a Means to Submicrometer Optical Lithography
IEDM invited paper, (82), pp.391-394
1982
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