Phase-shifting masks gain an edge

Book chapter

Electronic and Potonic Circuits and Devices, pp.119-126

01/1998

Abstract

Physics and Astronomy (all)

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Title: Phase-shifting masks gain an edge
Translated title: Phase-shifting masks gain an edge
Creators - without role: B.J. Lin
Publication Details: Electronic and Potonic Circuits and Devices, pp.119-126
Identifiers: 9780470544532; 0780334965; 9780780334960; 9957771084606774
Academic Unit: Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
Language: English
Resource Type: Book chapter