摘要
The miniaturization of actuators by microelectromechanical systems (MEMS) allows an increased mechanical bandwidth that can be utilized for improving response speed and control accuracy. MEMS also brings new control problems, such as control of electrostatic microactuators, to inspire both the MEMS and control communities to work together. This chapter will present recent developments of MEMS feedback control from the perspectives of application, design method, and implementation. © 2012 Springer Science+Business Media, LLC. All rights reserved.