- Title
- 1-cm range, 3-nm precision displacement measurement by triple-wavelength heterodyne interferometry
- Creators - without role
- Pei-Chi HuangShang-Da Yang - 國立清華大學電機資訊學院電機工程學系
- Publication Details
- Physical Society of Republic of China 2013 Annual Meeting
- Identifiers
- 9957771700706774
- Academic Unit
- Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
1-cm range, 3-nm precision displacement measurement by triple-wavelength heterodyne interferometry
Physical Society of Republic of China 2013 Annual Meeting
2013
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