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1.3 μm InAsP multiquantum well laser diodes with the n-type modulation-doped InAsP/InP/InGaP active region
Conference paper   Peer reviewed

1.3 μm InAsP multiquantum well laser diodes with the n-type modulation-doped InAsP/InP/InGaP active region

Po-Hsun Lei, Ming-Yuan Wu, Meng-Chyi Wu, Chong-Yi Lee, Wen-Jeng Ho and Chia-Chien Lin
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol.20(3), pp.1013-1018
05/2002

Abstract

The fabrication and analysis of 1.3 μm InAsP multiquantum well laser diodes (MQW LD) was reported. The n-type modulation-doped (MD) InAsP/InP/InGaP active region in these diodes was grown by metalorganic chemical vapor deposition. The threshold current densities, differential and internal quantum efficiencies and internal optical losses in the devices were analyzed as a function of thickness and doping concentration. An optimum doping concentration of 1*10 18 cm -3 was obtained for the doped InGAP barrier and doped InP intermediate layer. The doping reduced the threshold current density and threshold gain to 0.8 kA/cm 2 and 43.08 cm -1 respectively.

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