Abstract
In this paper, we present the design and fabrication of a 2D beam steering device using cascaded prism and grating deflectors. The device, based on a single prism with a maximum deflection angle of 5.6°, is able to achieve a maximum deflection angle of 29. 2 O for the cascaded three-prism stage design in the horizontal direction, a 4.6o deflection angle from the grating stage in the vertical direction, and a collimated 4μm beam diameter profile. © The Electrochemical Society.