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2T-Pixel Sensors Array for on-Wafer in-Chamber DUV Sensing
Conference paper

2T-Pixel Sensors Array for on-Wafer in-Chamber DUV Sensing

Wei-Hwa Lin, Chien-Ping Wang, Jiaw-Ren Shih, Chrong-Jung Lin and Ya-Chin King
2022 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA 2022
2022
DOI: https://doi.org/10.1109/VLSI-TSA54299.2022.9771024

Abstract

Electronic Optical and Magnetic Materials Computer Science Applications Hardware and Architecture Electrical and Electronic Engineering Safety Risk Reliability and Quality
A p-channel floating-gate-based DUV light detector and its sensing model are demonstrated in this work. The proposed DUV sensors array features 2T compact pixels and full compatibility to advanced CMOS logic process. In addition, a DUV-Induced charge emission model is proposed, where a field dependent emission efficiency is studied. A 2D array for in-situ DUV detection provides intensity distributions on wafer surface is successfully demonstrated.

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