Abstract
This study has successfully demonstrated a novel 3-axes polymer tactile sensor with built-in piezoresistive sensors. The sensor consists of polymer membrane and four sensing cantilevers with piezoresistors on both top and side walls to measure the in-plane and out-of-plane loads. The fabrication process allows the changing of polymer membrane material easily. As a result, the sensing range of the present 3D tactile sensor is easily tuned by varying the polymer material. ©2007 IEEE.