Abstract
This paper presents two new types of 3D fluidic oscillators that generate periodic flow outputs autonomously to realize clocking and switching functions. Thin diaphragms and tiny spheres are embedded into 3D integrated structures with 2 input and 1 output ports. Osmotic pumps with flowrates up to 0.03 ml/min are employed to power the oscillators. Driven by constant-rate flows with time-varying pressure, the thin diaphragms and tiny spheres oscillate and periodically switch the output flows. It is demonstrated for the first time that integrated pumps and fluidic oscillators can operate autonomously and achieve a maximum frequency up to 1.7 Hz.