60-MHz wine-glass micromechanical-disk reference oscillator

Yu-Wei Lin; Seungbae Lee; Sheng-Shian Li; Yuan Xie; Zeying Ren; Clark T.-C. Nguyen

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Conference paper

60-MHz wine-glass micromechanical-disk reference oscillator

Yu-Wei Lin, Seungbae Lee, Sheng-Shian Li, Yuan Xie, Zeying Ren and Clark T.-C. Nguyen

Digest of Technical Papers - IEEE International Solid-State Circuits Conference, Vol.47

2004

Abstract

A reference oscillator utilizing a 60MHz, MEMS-based, wine glass disk vibrating micromechanical resonator with a Q of 48,000 and sufficient power handling capability to achieve a far-from-carrier phase noise of -130dBc/Hz is demonstrated. When divided down to 10MHz, this corresponds to an effective level of -145dBc/Hz.

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Title: 60-MHz wine-glass micromechanical-disk reference oscillator
Creators - without role: Yu-Wei Lin - University of Michigan
Seungbae Lee - University of Michigan
Sheng-Shian Li - University of Michigan
Yuan Xie - University of Michigan
Zeying Ren - University of Michigan
Clark T.-C. Nguyen - University of Michigan
Identifiers: 9957774274006774
Academic Unit: Institute of NanoEngineering and Microsystems, College of Engineering, National Tsing Hua University
Language: English
Resource Type: Conference paper
Publication Details: Digest of Technical Papers - IEEE International Solid-State Circuits Conference, Vol.47

60-MHz wine-glass micromechanical-disk reference oscillator

Abstract

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