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8.5 GHz and 11.5 GHz Acoustic Delay Lines Using Higher-Order Lamb Modes in Lithium Niobate Thin Film
Conference paper

8.5 GHz and 11.5 GHz Acoustic Delay Lines Using Higher-Order Lamb Modes in Lithium Niobate Thin Film

Ruochen Lu, Yansong Yang, Michael Breen, Ming-Huang Li and Songbin Gong
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Vol.2020-January, pp.1242-1245
01/2020
DOI: https://doi.org/10.1109/MEMS46641.2020.9056190
Appears in  keyword about Physics

Abstract

5G acoustic delay line Lamb mode lithium niobate microelectromechanical system piezoelectricity X-band Electronic Optical and Magnetic Materials Condensed Matter Physics Mechanical Engineering Electrical and Electronic Engineering
We present the first group of X-band acoustic delay lines (ADLs) in lithium niobate (LiNbO 3 ) thin films. The fabricated miniature ADLs exploit the high phase velocities (vp) and large electromechanical couplings (k2) of the 2 nd -order symmetric (S2) mode and the 3 rd -order antisymmetric (A3) mode in Z-cut LiNbO3. The S2 passband centered at 8.55 GHz shows a minimum insertion loss (IL) of 13.3 dB, a 3-dB fractional bandwidth (FBW) of 1.20% and group delays between 11.5 ns and 93.6 ns, while the A3 passband centered at 11.5 GHz shows a minimum IL of 11.6 dB, an FBW of 1.14% and group delays between 9.0 ns and 65.1 ns. The vp, group velocity (vg), and propagation loss (PL) have been experimentally extracted. The demonstrated X-band ADL platform could potentially enable high-frequency passive signal processing functions for 5G applications.

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