A Bipolar-Biased Differential CMOS-MEMS CMUT

Conference paper

P.-C. Chen, Y.-C. Lin, H.-Y. Chen, 昇憲李 and M.-H. Li

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp.951-954

2024

Abstract

bipolar-biasing;CMOS-MEMS;CMUT;fully differential;receiver front-end (RX);resonator

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Title: A Bipolar-Biased Differential CMOS-MEMS CMUT
Creators - without role: P.-C. Chen - National Tsing Hua University
Y.-C. Lin - National Tsing Hua University
H.-Y. Chen - National Tsing Hua University
昇憲李
M.-H. Li - National Tsing Hua University
Identifiers: 9957768848906774
Academic Unit: Institute of NanoEngineering and Microsystems, College of Engineering, National Tsing Hua University
Language: English
Resource Type: Conference paper
Publication Details: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp.951-954