Abstract
Magnetic microbeads are widely used in biotechnology and biomedical research for manipulation and detection of cells and biomolecules. This work presents an integrated platform to perform microbead-based manipulation and detection by implementing electromagnetic microcoils and capacitive biosensors on a CMOS (complementary metal oxide semiconductor) chip. Our detection method provides the advantages of convenient fabrication and requiring no externally applied magnetic fields for operation. Microbeads coated with streptavidin were successfully driven to the sensor sites and detection of a single microbead was demonstrated with an average capacitance change of -5.3 fF. © 2013 IEEE.