- Title
- A Decision Framework for Dispatching Problem of Lithography Area in Semiconductor Manufacturing
- Creators - without role
- J.-Z. WuChen-Fu Chien - 國立清華大學工學院工業工程與工程管理學系W.-M. Hsin
- Publication Details
- Proceedings of 9th International Conference on Intelligent Manufacturing and Logistics Systems & 2013 International Symposium on Semiconductor Manufacturing Intelligence (IML2013&ISMI2013) Proceedings of 9th International Conference on Intelligent Manufacturing and Logistics Systems & 2013 International Symposium on Semiconductor Manufacturing Intelligence (IML2013&ISMI2013)
- Identifiers
- 9957771109806774
- Academic Unit
- Department of Industrial Engineering and Engineering Management, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
A Decision Framework for Dispatching Problem of Lithography Area in Semiconductor Manufacturing
Proceedings of 9th International Conference on Intelligent Manufacturing and Logistics Systems & 2013 International Symposium on Semiconductor Manufacturing Intelligence (IML2013&ISMI2013) Proceedings of 9th International Conference on Intelligent Manufacturing and Logistics Systems & 2013 International Symposium on Semiconductor Manufacturing Intelligence (IML2013&ISMI2013)
2013
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