- Title
- A Dynamic Overlay Sampling Scheme for APC in High-Mix Fab
- Creators - without role
- Chen-Fu Chien - 國立清華大學工學院工業工程與工程管理學系Y.-J. ChenH.-H. ChouY.-M. LiaoC.-M. HungC.-C. Chien
- Publication Details
- Proceedings of 20th International Symposium on Semiconductor Manufacturing (ISSM) Proceedings of 20th International Symposium on Semiconductor Manufacturing (ISSM)
- Identifiers
- 9957773876806774
- Academic Unit
- Department of Industrial Engineering and Engineering Management, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
A Dynamic Overlay Sampling Scheme for APC in High-Mix Fab
Proceedings of 20th International Symposium on Semiconductor Manufacturing (ISSM) Proceedings of 20th International Symposium on Semiconductor Manufacturing (ISSM)
2012
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