- Title
- A Fault Detection and Classification Framework for Yield Enhancement in Semiconductor Manufacturing
- Creators - without role
- Chen-Fu Chien - 國立清華大學工學院工業工程與工程管理學系C.-Y. HsuP.-N. Chen
- Publication Details
- 21st International Conference on Flexible Automation Intelligent Manufacturing (FAIM) 2011 21st International Conference on Flexible Automation Intelligent Manufacturing (FAIM) 2011
- Identifiers
- 9957777457106774
- Academic Unit
- Department of Industrial Engineering and Engineering Management, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
A Fault Detection and Classification Framework for Yield Enhancement in Semiconductor Manufacturing
21st International Conference on Flexible Automation Intelligent Manufacturing (FAIM) 2011 21st International Conference on Flexible Automation Intelligent Manufacturing (FAIM) 2011
2011
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