A High Quality Dielectric Layer of EWOD Microfluidic Device Using LPCVD Si3N4

Conference paper

Hsien-Hua Shen and Da-Jeng Yao

7th Annual IEEE International conference on Nano/Molecular Medicine and Engineering (IEEE-Nanomed 2013)

11/2013

Abstract

Dielectric Layer;EWOD;Microfluidic;LPCVD

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Title: A High Quality Dielectric Layer of EWOD Microfluidic Device Using LPCVD Si3N4
Creators - without role: Hsien-Hua Shen
Da-Jeng Yao
Publication Details: 7th Annual IEEE International conference on Nano/Molecular Medicine and Engineering (IEEE-Nanomed 2013)
Identifiers: 9957766859506774
Academic Unit: Department of Physical Education, Hsinchu Teachers College, National Tsing Hua University
Language: English
Resource Type: Conference paper