- Title
- A High-Resolution Microfabricated Vernier-Type Displacement Sensor Using Suspended Gate FETs
- Creators - without role
- J.-H. HsuR. Chen - 國立清華大學工學院動力機械工程學系Max T.-K. Hou
- Publication Details
- the 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology the 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology
- Identifiers
- 9957766204806774
- Academic Unit
- Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
A High-Resolution Microfabricated Vernier-Type Displacement Sensor Using Suspended Gate FETs
the 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology the 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology
2010
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