- Title
- A Kinematic Analysis of Chemical Mechanical Planarization Based on Velocity Model of the Planetary Train
- Creators - without role
- 宏營 蔡
- Publication Details
- 第三屆奈米工程暨微系統技術研討會論文集
- Identifiers
- 9957769723206774
- Academic Unit
- Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
- Resource Type
- Conference paper
Conference paper
A Kinematic Analysis of Chemical Mechanical Planarization Based on Velocity Model of the Planetary Train
第三屆奈米工程暨微系統技術研討會論文集
1999
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