- Title
- A Lexicographic Multiple Objective Genetic Algorithm for Dispatching Jobs in the Photolithography Process of Semiconductor Wafer Fabrication
- Creators - without role
- J.-Z. WuChen-Fu Chien - 國立清華大學工學院工業工程與工程管理學系W.-M. Hsin
- Identifiers
- 9957775045106774
- Academic Unit
- Department of Industrial Engineering and Engineering Management, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
- Publication Details
- Proceedings of the 9th annual IEEE International Conference on Automation Science and Engineering (IEEE CASE 2013) Proceedings of the 9th annual IEEE International Conference on Automation Science and Engineering (IEEE CASE 2013)
Conference paper
A Lexicographic Multiple Objective Genetic Algorithm for Dispatching Jobs in the Photolithography Process of Semiconductor Wafer Fabrication
Proceedings of the 9th annual IEEE International Conference on Automation Science and Engineering (IEEE CASE 2013) Proceedings of the 9th annual IEEE International Conference on Automation Science and Engineering (IEEE CASE 2013)
2013
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