A MEMS-actuated tunable microdisk resonator

M.-C.M. Lee; M.C. Wu

doi:10.1109/OMEMS.2003.1233451

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Conference paper

A MEMS-actuated tunable microdisk resonator

M.-C.M. Lee and M.C. Wu

2003 IEEE/LEOS International Conference on Optical MEMS, pp.28-29

2003

DOI: https://doi.org/10.1109/OMEMS.2003.1233451

Abstract

Actuators

Coupling circuits

Fabrication

Micromechanical devices

Optical resonators

Optical waveguides

Resonator filters

Tunable circuits and devices

Waveguide discontinuities

Wavelength division multiplexing

A novel tunable microdisk resonator with integrated MEMS actuator to alter coupling gap is proposed and experimentally demonstrated for the first time. The fabricated device shows a transmittance change about 8 dB and a quality factor of 6200. © 2003 IEEE.

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Title: A MEMS-actuated tunable microdisk resonator
Creators - without role: M.-C.M. Lee - University of California, Los Angeles
M.C. Wu - University of California, Los Angeles
Publication Details: 2003 IEEE/LEOS International Conference on Optical MEMS, pp.28-29
Identifiers: 078037830X; 9780780378308; 9957767637506774
Academic Unit: Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
Language: English
Resource Type: Conference paper

A MEMS-actuated tunable microdisk resonator

Abstract

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