A MEMS position encoder for comb-drive actuators using suspended gate field-effect transistors

Tung-Wei Lin; Max Ti-Kuang Hou; Rongshun Chen

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A MEMS position encoder for comb-drive actuators using suspended gate field-effect transistors

Conference paper

Peer reviewed

A MEMS position encoder for comb-drive actuators using suspended gate field-effect transistors

Tung-Wei Lin, Max Ti-Kuang Hou and Rongshun Chen

Key Engineering Materials, Vol.326-328 II, pp.1379-1382

2006

Abstract

Displacement sensing

MEMS position encoder

Suspended gate

Materials Science (all)

Mechanics of Materials

Mechanical Engineering

Utilizing suspended gate field-effect transistors (SGFETs), a displacement sensing mechanism is proposed in this paper. The design, numerical simulations, and fabrication process of the SGFET are presented. The SGFET arrays and the comb-drive actuator are integrated to form a MEMS position encoder. The resolution of the proposed MEMS position encoder is 6 μm over a 54 μm travel range. By arranging the SGFETs into arrays, position feedback over a large travel range is achieved for a comb-drive actuator.

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Title: A MEMS position encoder for comb-drive actuators using suspended gate field-effect transistors
Creators - without role: Tung-Wei Lin - Department of Power Mechanical Engineering , National Tsing Hua University
Max Ti-Kuang Hou - Department of Mechanical Engineering , China Institute of Technology
Rongshun Chen - Department of Power Mechanical Engineering , National Tsing Hua University
Publication Details: Key Engineering Materials, Vol.326-328 II, pp.1379-1382
Identifiers: 9957773626706774
Academic Unit: Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
Language: English
Resource Type: Conference paper

A MEMS position encoder for comb-drive actuators using suspended gate field-effect transistors

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