A Micro Scanning Mirror Actuated by <110> Vertical Comb Actuators

Conference paper

Ching-Hua Chiu, Ching-Chen Tu, Wen-Hao Lin and Cheng-Hsien Liu

3rd Asia-Pacific Conference of Transducers and Micro-Nano Technology 3rd Asia-Pacific Conference of Transducers and Micro-Nano Technology

2006

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Title: A Micro Scanning Mirror Actuated by <110> Vertical Comb Actuators
Creators - without role: Ching-Hua Chiu
Ching-Chen Tu
Wen-Hao Lin
Cheng-Hsien Liu - 國立清華大學工學院動力機械工程學系
Publication Details: 3rd Asia-Pacific Conference of Transducers and Micro-Nano Technology 3rd Asia-Pacific Conference of Transducers and Micro-Nano Technology
Identifiers: 9957768095906774
Academic Unit: Institute of NanoEngineering and Microsystems, College of Engineering, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper