A New Self-Powered Wireless Sensing Circuitry for On-Wafer In-Situ EUV Detection

Wei-Hwa Lin; Li Ci Chen; Ming-Han Ho; Hong-Shen Chen; Yu-Lun Hu; Burn Jeng Lin; Pin-Jiun Wu; Jenny Yi-Chun Liu; Yue-Der Chih; Jonathen Chang; Jiaw-Ren Shih; Chrong Jung Lin; Ya-Chin King

doi:10.1109/IEDM45625.2022.10019411

Conference paper

A New Self-Powered Wireless Sensing Circuitry for On-Wafer In-Situ EUV Detection

Wei-Hwa Lin, Li Ci Chen, Ming-Han Ho, Hong-Shen Chen, Yu-Lun Hu, Burn Jeng Lin, Pin-Jiun Wu, Jenny Yi-Chun Liu, Yue-Der Chih, Jonathen Chang, …

Technical Digest - International Electron Devices Meeting, IEDM, Vol.2022-December, pp.3151-3154

2022

DOI: https://doi.org/10.1109/IEDM45625.2022.10019411

Appears in keyword about Physics

Abstract

Electronic

Optical and Magnetic Materials

Condensed Matter Physics

Materials Chemistry

Electrical and Electronic Engineering

A novel on-wafer self-powered wireless sensing module for extreme ultraviolet (EUV) lithographic process is proposed. A surface sensing pad controlled oscillator oscillate at a frequency proportional to the EUV intensity, where its signal is transmitted wirelessly through an on-chip antenna (OCA). Therefore, the self-powered sensor module can provide wireless EUV monitoring across wafer in advanced lithographic chambers.

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Title: A New Self-Powered Wireless Sensing Circuitry for On-Wafer In-Situ EUV Detection
Translated title: A New Self-Powered Wireless Sensing Circuitry for On-Wafer In-Situ EUV Detection
Creators - without role: Wei-Hwa Lin - Institute of Electronics Engineering , National Tsing Hua University (NTHU)
Li Ci Chen - Institute of Electronics Engineering , National Tsing Hua University (NTHU)
Ming-Han Ho - Institute of Electronics Engineering , National Tsing Hua University (NTHU)
Hong-Shen Chen - Institute of Electronics Engineering , National Tsing Hua University (NTHU)
Yu-Lun Hu - Institute of Electronics Engineering , National Tsing Hua University (NTHU)
Burn Jeng Lin - National Tsing Hua University
Pin-Jiun Wu - National Synchrotron Radiation Research Center
Jenny Yi-Chun Liu - Institute of Electronics Engineering , National Tsing Hua University (NTHU)
Yue-Der Chih - Design and Technology Platform , Taiwan Semiconductor Manufacturing Company (TSMC)
Jonathen Chang - Taiwan Semiconductor Manufacturing Company (Taiwan)
Jiaw-Ren Shih - Institute of Electronics Engineering , National Tsing Hua University (NTHU)
Chrong Jung Lin - Institute of Electronics Engineering , National Tsing Hua University (NTHU)
Ya-Chin King - National Tsing Hua University
Publication Details: Technical Digest - International Electron Devices Meeting, IEDM, Vol.2022-December, pp.3151-3154
Identifiers: 9781665489591; 9957776488906774
Academic Unit: Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University; Institute of Electronics Engineering, College of Electrical Engineering and Computer Science, National Tsing Hua University
Language: English
Resource Type: Conference paper

A New Self-Powered Wireless Sensing Circuitry for On-Wafer In-Situ EUV Detection

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