Abstract
This study presents a novel tactile force sensor that consists of (1) anisotropic magneto-resistive (AMR) structure as the sensing unit, (2) polymer encapsulation as the spring, and (3) rigid magnet as the tactile bump (contact interface for applied loads) (Fig. 1a). The normal force will deform the polymer and cause the displacement of magnet to lead to the resistance change of AMR (Fig. 1b). Thus, normal loads are detected by resistance changes of AMR sensing chip. In summary, merits of this study are: (1) the AMR sensing film is easily fabricated on chip, (2) the resistance change of AMR sensing unit is easy to measure, (3) by using the rigid magnet as the tactile bump and the magnetic field source. Measurements (Table 1) demonstrate the feasibility of the presented AMR force sensor design.