Abstract
In this paper, for the first time, the phenomenon of mode localization has been investigated for a 3-DOF thermal piezoresistive MEMS coupled-resonator attaining a decent quality factor value of 1,367 in ambient condition. The differential scheme enables effective feedthrough cancellation leading to enhanced signal to noise ratio (SNR). The proposed mechanically coupled differential ring-shaped thermal piezoresistive resonator (DR-TPR) is made to operate in rotational mode to minimize the effect of viscous damping caused by the surrounding medium. The utilization of mode localization in coupled TPR introduces the inherent enhancement of sensitivity and common-mode rejection compared to the frequency shift counterparts to open doors for the realization of different sensors working in ambient conditions.