- Title
- A Proposed Framework of PI Controller of Overlay Error Reduction in Semiconductor Manufacturing
- Creators - without role
- C.-Y. HsuH.-K. WangY.-J. ChenChen-Fu Chien - 國立清華大學工學院工業工程與工程管理學系T.-S. ChouG. ChouG.-H. Lee
- Publication Details
- 6th International Conference on Intelligent Manufacturing & Logistics Systems (IML) 6th International Conference on Intelligent Manufacturing & Logistics Systems (IML)
- Identifiers
- 9957774172106774
- Academic Unit
- Department of Industrial Engineering and Engineering Management, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
A Proposed Framework of PI Controller of Overlay Error Reduction in Semiconductor Manufacturing
6th International Conference on Intelligent Manufacturing & Logistics Systems (IML) 6th International Conference on Intelligent Manufacturing & Logistics Systems (IML)
2010
Metrics
1 Record Views