A Proposed Framework of PI Controller of Overlay Error Reduction in Semiconductor Manufacturing

Conference paper

Goddie Chou, Ying-Jen Chen, Chia-Yu Hsu, Chen-Fu Chien and 宏鍇王

The 6th International Conference on Intelligent Manufacturing and Logistics Systems

2010

Abstract

PI Controller of

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Title: A Proposed Framework of PI Controller of Overlay Error Reduction in Semiconductor Manufacturing
Creators - without role: Goddie Chou
Ying-Jen Chen
Chia-Yu Hsu
Chen-Fu Chien
宏鍇王
Publication Details: The 6th International Conference on Intelligent Manufacturing and Logistics Systems
Grant note: 國科會
Identifiers: 9957774983306774
Academic Unit: Executive Cross-Discipline Master Program for Intelligent Manufacturing, Office of Academic Affairs, National Tsing Hua University
Language: English
Resource Type: Conference paper