- Title
- A Real-Time Micromachined Strain Sensor for MEMS
- Creators - without role
- C.-H. LinC.–C. WangR. Chen - 國立清華大學工學院動力機械工程學系
- Identifiers
- 4886860001; 9957772176206774
- Academic Unit
- Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
- Publication Details
- International Conference on Electrical Engineering (ICEE 2004) International Conference on Electrical Engineering (ICEE 2004)
Conference paper
A Real-Time Micromachined Strain Sensor for MEMS
International Conference on Electrical Engineering (ICEE 2004) International Conference on Electrical Engineering (ICEE 2004)
2004
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