A Resonant Piezoelectric MEMS Mirror with 180-Degree Optical Scan Angle Under Atmosphere Pressure

Conference paper

Hung-Yu Lin, Hao-Chien Cheng, Hao-Chien Cheng, Chih-Chen Hsu, Si-Han Chen, Jer-Wei Hsieh, Ruey-Shing Huang, 梅鳳賴 and Wei-Leun Fang

2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

25/06/2023

Abstract

Micromechanical devices;Actuators;Voltage measurement;Optical design;Resonant frequency;Optical variables measurement;Mirrors

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Title: A Resonant Piezoelectric MEMS Mirror with 180-Degree Optical Scan Angle Under Atmosphere Pressure
Creators - without role: Hung-Yu Lin
Hao-Chien Cheng
Hao-Chien Cheng
Chih-Chen Hsu
Si-Han Chen
Jer-Wei Hsieh
Ruey-Shing Huang
梅鳳賴
Wei-Leun Fang
Publication Details: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
Identifiers: 9957770402306774
Academic Unit: Institute of NanoEngineering and Microsystems, College of Engineering, National Tsing Hua University
Language: English
Resource Type: Conference paper