Abstract
This work investigates, for the first time, an analytical model of a generic coupled piezoelectric resonator based on support transducer topology. Since a “coupled resonator” consists of multiple length extensional mode (LE) transducer arms and an isochoric bulk mode resonator, we treat each component as a distinct sub-resonator and integrate them into a multiple-port electromechanical circuit based on an array-composite concept. In this work, 2-D finite-element method (FEM) simulations are performed to compensate the uncertainty of analytical solution on the electromechanical coupling coefficient (k t 2 ) caused by the elastic modulus mismatch between the single crystal silicon (SCS) passive layer and the aluminum nitride (AlN) transducer. For verification, a TPoS coupled resonator based on AlN-on-Si topology is simulated with the proposed numerical model, showing a motional resistance (Rm) prediction error less than 3.5% and 13.2% as compared with FEM and measurement results, respectively.