Abstract
Low temperature a-SiGeC thin film photovoltaic (TFPV) ambient light-energy harvesters monolithically integrated with high performance 3D sequentially stackable device were demonstrated in this article. The 3D stackable device with threshold voltage engineering and driving current boosting technologies enable excellent current controllability to achieve low Ioff and high Ion operation condition for integrated circuit design. The monolithically stacking of Si thin-film energy harvester, which provide output power (21.93uW/cm2) under 450 lux indoor illumination, envisions self-power and low cost 3D+IC for internet of things.