- 題名
- A Study of Electron Beam Focusing and Depth Profiling by DUV-Induced Surface Charging of Floating Metal Electrode Arrays
- 創作者：
- Ho-Ting Chao (作者)Shang-Chen Tsai (作者)Wei Chang (作者)LIN, Burn-Jeng (作者)Jiaw-Ren Shih (作者)Chrong-Jung Lin - 國立清華大學, 半導體研究學院King, Ya-Chin (作者)
- 會議
- 2025 International Conference on Solid State Devices and Materials (Pacifico Yokohama, Japan, 15/09/2025–18/09/2025)
- 學術資源類型
- 會議論文
- 語言
- 英語
會議論文
A Study of Electron Beam Focusing and Depth Profiling by DUV-Induced Surface Charging of Floating Metal Electrode Arrays
2025 International Conference on Solid State Devices and Materials (Pacifico Yokohama, Japan, 15/09/2025–18/09/2025)
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