- Title
- A Tunable Transmission MEMES Grating via <110> Vertical Comb Actuators
- Creators - without role
- Ching-Hua ChiuYao-Chen WangCheng-Hsien Liu - 國立清華大學工學院動力機械工程學系
- Publication Details
- Asia-Pacific Conference of Transducers and Micro-Nano Technology, Singapore Asia-Pacific Conference of Transducers and Micro-Nano Technology, Singapore
- Identifiers
- 9957775945806774
- Academic Unit
- Institute of NanoEngineering and Microsystems, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
A Tunable Transmission MEMES Grating via <110> Vertical Comb Actuators
Asia-Pacific Conference of Transducers and Micro-Nano Technology, Singapore Asia-Pacific Conference of Transducers and Micro-Nano Technology, Singapore
2006
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