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A chemical Surface Acoustic Wave(SAW) sensor array for sensing different concentration of NH3
Conference paper

A chemical Surface Acoustic Wave(SAW) sensor array for sensing different concentration of NH3

Hsu-Chao Hao, Tai-Hsuan Lin, Mei-Ching Chen and Da-Jeng Yao
2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, pp.1092-1096
2010

Abstract

LiNbO3 Non-continuously Organic compound gases Surface acoustic wave (SAW)
Surface acoustic wave (SAW) sensor is generally known as high-resolution mass-sensitive transducers. We developed a novel SAW sensing array based on 2x2 non-continuously working oscillators equipped with differently coated SAW sensors, respectively, which is used to analyze organic compound gases. The sensing array consisting of four two-port SAW resonator sensors with a fundamental frequency at 99.8 MHz was fabricated on LiNbO 3 substrate. Four different polymers were coated on the surface of sensing regions. The gas sensing array was put into 10L reaction chamber with temperature and humidity controllable environment. The frequency outputs from each sensor were used to compare with the frequency from a reference device for eliminating the environmental effects. The results suggest that frequency shift of the designed gas sensor array changes with different concentration of the target gas(NH 3 ). ©2010 IEEE.

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