A direct comparison of the arsenic dimer/tetramer ratio for tantalum and tungsten GSMBE/MOMBE cracking tubes

Conference paper

A direct comparison of the arsenic dimer/tetramer ratio for tantalum and tungsten GSMBE/MOMBE cracking tubes

S. L. Jackson, J. N. Baillargeon, K. Y. Cheng and G. E. Stillman

1991 Electronic Materials Conference

1991

Abstract

arsenic dimer/tetramer ratio;tantalum;tungsten;GSMBE/MOMBE

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Title: A direct comparison of the arsenic dimer/tetramer ratio for tantalum and tungsten GSMBE/MOMBE cracking tubes
Creators - without role: S. L. Jackson
J. N. Baillargeon
K. Y. Cheng
G. E. Stillman
Identifiers: 9957767505306774
Academic Unit: National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper
Publication Details: 1991 Electronic Materials Conference