Abstract
In this paper, we present a large-scanning-angle and large-mirror microscanner actuated by the thermal actuators. The thermal actuators are based on bimorph effect and consist of three thin film layers, Polyimide, Au, and SiO 2 . The large mirror is released rapidly by using poly-pad combined with surface micromachining and bulk micromachining. The actuator has the adventure of low power consumption from our design. Furthermore, our microscanner can achieve the purposes of self-assembly and out-of-plane by residual stress after curing processes.