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A large out-of-plane motion mechanism for optical applications
Conference paper

A large out-of-plane motion mechanism for optical applications

J.M. Tsai, Chien Cheng Chu, Jerwei Hsieh and Weileun Fang
2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest, pp.59-60
2002
DOI: https://doi.org/10.1109/OMEMS.2002.1031442

Abstract

Hardware and Architecture Control and Systems Engineering Electrical and Electronic Engineering Electronic Optical and Magnetic Materials
Utilizing the high aspect ratio process on [111] Si substrate (BELST process), a large out-of-plane motion actuator that can be applied for MOEMS has been developed. In this design, the combination of vertical comb and robust leverage are exploited to provide an extremely large out-of-plane motion. Moreover, the thickness of the twin-beams torsional bar can also be trimmed to reduce the driving voltage.

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