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A magnetic repulsive force MEMS actuator
Conference paper

A magnetic repulsive force MEMS actuator

Tsung-Lin Tang, Hsueh-An Yang, Han-Tang Su and Weileun Fang
TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, pp.2235-2238
2007

Abstract

Induced current Magnetic bearing Micro actuator Repulsive force
This study reports a novel in-plane actuator driven by magnetic repulsive force using current on two antiparallel wires. There are three merits of this study: (1) no pull-in problem, (2) the repulsive force can be exploited as a magnetic bearing to prevent the contact of actuators with others, and (3) the magnetic repulsive force can act as a non-linear spring to dynamically couple multiple actuators/oscillators. To demonstrate the present concept, this study employed the AC eddy-current induced magnetic repulsive force to drive and to dynamic couple two Cu oscillators. ©2007 IEEE.

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