Abstract
In this paper, a novel active micro-chip for the manipulation of micro-particles based on the alternating current electro-osmosis flow, which is induced by the specific tri-concentric circle microelectrodes array, has been successfully developed and demonstrated. The concentric circle microelectrodes are non-planar with part of the microelectrode surface deposited with a patterned SiO 2 dielectric layer. This proposed design could not only trap the bio-particles as early report did but also transport the particles among traps. From the experimental demonstration, the manipulation of single bioparticle without the coupling effect among adjacent traps has been verified. The electrolysis phenomena have been also reduced during the functional manipulation via our microsystem design. ©2007 IEEE.