Abstract
This study presents a new, pneumatically-driven micropump made of PDMS (polydimethylsiloxane) membranes for liquid delivery. Liquid samples can be transported by using a new mechanism generated by three oil-hydraulic chambers, which were first filled with liquid (mineral oil) and then deformed by compressed air such that an amplified deformation of the PDMS membranes can be generated for liquid transportation. Experimental results showed that the new mechanism could be used to amplify the deformation of membranes and generate considerable pumping rates. It could be promising for automation of microfluidic devices and systems. © 2013 IEEE.