Abstract
This study reports a new platform capable of assembling carbon nanotubes (CNTs) between electrodes to form CNT-based nano sensors based on the combination of optically-induced dielectrophoresis (ODEP) force and dielectrophoresis (DEP) force. Indium-tin-oxide (ITO) electrodes and amorphous silicon (a-Si) layer were patterned and then used to assemble CNTs. By utilizing moving light patterns, the CNTs could be collected to the central area between two ITO electrodes. The CNTs with different concentrations can be collected to form CNT-based nano sensors with different widths of sensing elements successfully. Preliminary results for CNTs immobilization were also demonstrated by exposing them to an ultraviolet (UV) light source. © 2011 IEEE.