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A novel CBCM method free from charge injection induced errors: Investigation into the impact of floating dummy-fills on interconnect capacitance
Conference paper

A novel CBCM method free from charge injection induced errors: Investigation into the impact of floating dummy-fills on interconnect capacitance

Y.W. Chang, H.W. Chang, T.C. Lu, Y. King, W. Ting, J. Ku and C.Y. Lu
IEEE International Conference on Microelectronic Test Structures, pp.235-238
2005

Abstract

By CIEF CBCM, a novel CBCM method free from the errors induced by charge-injection, it is the first time to investigate into the impact of floating dummy-fills on interconnect capacitance in practice. The impact of floating dummy-fills is confirmed to play an important role on successful circuit design. Besides, a guideline to optimize the chip performance and minimize the crosstalk by dummy pattern design is also proposed in this paper. © 2005 IEEE.

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