Abstract
This study proposes an absolute measurement method with a computer-generated hologram (CGHs) to assist the identification of manufacturing form error, and gravity and mounting resulted distortions for a 300 mm aspherical mirror. This method adopts the frequency of peaks and valleys of each Zernike coefficient grabbed by the measurement with various orientations of the mirror in horizontal optical-axis configuration. In addition, the rotational-symmetric aberration (spherical aberration) is calibrated with random ball test method. According to the measured absolute surface figure, a high accuracy aspherical surface with peak to valley (P-V) value of 1/8 wave @ 632.8 nm was fabricated after surface figure correction with the reconstructed error map.