Abstract
This paper presents a novel micro-well array chip fabricated by micromachining and CMOS technology for biomedical application. The chip is designed to provide multi-function for liquid phase DNA or protein sample processing and detection, its function and structure includes heating, cooling, temperature sensing, vibration agitation, control circuits, array of micro-wells, and a transparent cover with liquid seal at each well. The embedded heater shows good linearity and can heat up to 101 °C with ∼20 mA current supply, liquid phase biomaterials such as probes and samples can be processed (hybridization, mixing, separation, washing, and detection) on the chip. © 2003 Elsevier B.V. All rights reserved.