Abstract
This study has successful demonstrated a novel neural recording probe with built-in piezoresistive sensors. The probe consists of three piezoresistors on both top and side walls of its supporting springs to measure the normal and transverse loads during neural recording. Moreover, the probe tip is covered with low-resistive silicon on top and side surfaces. Thus, the sensing tip has less dead space during neural detection. A neural probe has been successfully fabricated on SOI wafer and tested using crayfish. © 2007 IEEE.