Abstract
A novel self-assembly method of particles on the specific hydrophilic pattern regions to fabricate nano/micro patterns has been investigated in this study. The surface hydrophilicity modification is employed to tune the contact angle of droplet. Control of surface energy was investigated in this study for finely tuning the shape and layer number of particles assembly. The micro/nano patterns formed by commercial polystyrene (PS) and colloidal silica aqueous suspension (Bayer-50CK) particles on silicon substrates after O 2 and H 2 plasma treatments were demonstrated. ©2005 IEEE.